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By Pittman J., Huang E., Nevis J.

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EXECUTIVE SUMMARY Problem Installing a new measurement apparatus and calibrating it so that it produces verifiable results can be a daunting procedure that requires a large number of steps. This case study shows how design of experiments (DOE), statistical process control (SPC), and ordinary least squares regression each play a role in the calibration process. How to use the information generated during the calibration process to establish detection limits for the measurement process will also be shown.

The measurement is not significantly affected by any of the six factors studied: operator, cassette type, slot loading, prior film, C2C station, and probe conditioning. PROCESS A number of critical processes in the manufacture of integrated circuits are monitored and controlled using measurements of thin film sheet resistance. Prometrix automatic fourpoint probers are ubiquitous instruments that perform this measurement task. These probers operate by setting down four collinear electrodes onto the surface of the film to be measured.

The measurements should be close to the target value of the reference product. This allows tracking tool drift over time. Bias, which is the difference between the average value of all the measurements and the true or target value, expresses the extent to which the measurements deviate from the desired value. A gauge needs to be calibrated so that it is accurate (small bias). Calibration is the procedure used to adjust the measurements from a gauge so that they are close to the true or target values, which may cover a range of values.

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